d'Optron Pte Ltd 1 article published in JoVE Engineering Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization Thomas Bourgade1, Sun Jianfei1, Zhaomin Wang1, Rosmin Elsa2, Anand Asundi1,2 1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2 We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.
