تصنيع وتوصيف رنانات غشاء نيتريد السيليكون عالية Q

0:42

Spin Coating and Vapor-Phase Priming of Silicon Nitride Wafers for Photolithography Preparation

2:28

Photolithography for Patterning Resonator Structures on Silicon Nitride Wafers Using a Maskless Aligner

4:16

Reactive Ion Etching and Chip-Scale Wet Etching for Fabrication of Free-Standing Silicon Nitride Resonators

6:56

Optical Lever-Based Displacement and Energy Ringdown Measurements of Silicon Nitride Resonators

8:59

Results