fabrication-process-of-silicone-based-dielectric-elastomer-actuators

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

Ecole Polytechnique Fédérale de Lausanne

The application of electrical fields within a microfluidic channel enables many forms of manipulation necessary for lab-on-a-chip devices. Patterning electrodes inside the microfluidic channel generally requires multi-step optical lithography. Here, we utilize an ion-implantation process to pattern 3D electrodes within a fluidic channel made of polydimethylsiloxane (PDMS). Electrode structuring within the channel is achieved by ion implantation at a 40 degrees angle with a metal shadow mask. The advantages of three-dimensional structuring of electrodes within a fluidic channel over traditional planar electrode designs are discussed. Two possible applications are presented: asymmetric particles can be aligned in any of the three axial dimensions with electro-orientation; colloidal focusing and concentration within a fluidic channel can be achieved through dielectrophoresis. Demonstrations are shown with E. coli, a rod shaped bacteria, and indicate the potential that ion-implanted microfluidic channels have for manipulations in the context of lab-on-a-chip devices.

3-dimensional electrode patterning within a microfluidic channel using metal ion implantation.

A key element in stretchable actuators, sensors, and systems based on elastomer materials are compliant electrodes. While there exist many methodologies for fabricating electrodes on dielectric elastomers, very few succeed in achieving high-resolution patterning over large areas. We present a novel approach for the production of mechanically robust, high-resolution compliant electrodes for stretchable silicone elastomer actuators and sensors. Cast, 2-50 μm thick poly(dimethylsiloxane) (PDMS)-carbon composite layers are patterned by laser ablation and subsequently bonded to a PDMS membrane by oxygen plasma activation. The technique affords great design flexibility and high resolution and readily scales to large-area arrays of devices. We validate our methodology by producing arrays of actuators and sensors on up to A4-size substrates, reporting on microscale dielectric elastomer actuators (DEA) generating area strains of over 25%, and interdigitated capacitive touch sensors with high sensitivity yet insensitivity to substrate stretching. We demonstrate the ability to cofabricate highly integrated multifunctional transducers using the same process flow, showing the methodology's promise in realizing sophisticated and reliable complex stretchable devices with fine features over large areas.

High-Resolution, Large-Area Fabrication of Compliant Electrodes via Laser Ablation for Robust, Stretchable Dielectric Elastomer Actuators and Sensors.

A highly versatile soft gripper that can handle an unprecedented range of object types is developed based on a new design of dielectric elastomer actuators employing an interdigitated electrode geometry, simultaneously maximizing both electroadhesion and electrostatic actuation while incorporating self-sensing. The multifunctionality of the actuator leads to a highly integrated, lightweight, fast, soft gripper with simplified structure and control.

Article	Year
3-dimensional electrode patterning within a microfluidic channel using metal ion implantation. Lab on a chip\| PubMed ID: 20221568	2010
High-Resolution, Large-Area Fabrication of Compliant Electrodes via Laser Ablation for Robust, Stretchable Dielectric Elastomer Actuators and Sensors. ACS applied materials & interfaces\| PubMed ID: 26197865	2015
Versatile Soft Grippers with Intrinsic Electroadhesion Based on Multifunctional Polymer Actuators. Advanced materials (Deerfield Beach, Fla.)\| PubMed ID: 26551665	2016

Samuel Rosset

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