demonstration-hyperlens-integrated-microscope-super-resolution

Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging

The use of super-resolution imaging to overcome the diffraction limit of conventional microscopy has attracted the interest of researchers in biology and ...

demonstration-equal-intensity-beam-generation-dielectric

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

The fabrication and characterization protocol for a metasurface beam splitter, enabling equal-intensity beam generation, is demonstrated. Hydrogenated ...

Pohang University of Science and Technology (POSTECH)

Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however, it is still challenging to make elaborate and complex 3D nanostructures that many researchers want to realize for further interesting physics studies and device applications. Electron beam lithography, one of the two-dimensional (2D) nanofabrication techniques, is also feasible to realize elaborate 3D nanostructures by stacking each 2D nanostructures. However, alignment errors among the individual 2D nanostructures have been difficult to control due to some practical issues. In this work, we introduce a straightforward approach to drastically increase the overlay accuracy of sub-20 nm based on carefully designed alignmarks and calibrators. Three different types of 3D nanostructures whose designs are motivated from metamaterials and plasmonic structures have been demonstrated to verify the feasibility of the method, and the desired result has been achieved. We believe our work can provide a useful approach for building more advanced and complex 3D nanostructures.

Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay.

Metamaterials are composed of nanostructures, called artificial atoms, which can give metamaterials extraordinary properties that cannot be found in natural materials. The nanostructures themselves and their arrangements determine the metamaterials' properties. However, a conventional metamaterial has fixed properties in general, which limit their use. Thus, real-world applications of metamaterials require the development of tunability. This paper reviews studies that realized tunable and reconfigurable metamaterials that are categorized by the mechanisms that cause the change: inducing temperature changes, illuminating light, inducing mechanical deformation, and applying electromagnetic fields. We then provide the advantages and disadvantages of each mechanism and explain the results or effects of tuning. We also introduce studies that overcome the disadvantages or strengthen the advantages of each classified tunable metamaterial.

ArticleTotal : 2	Year
Publication title Cited by 8	2017
Publication title Cited by 12	2019

Article	Year
Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay. Scientific reports\| PubMed ID: 28751643	2017
Recent Advances in Tunable and Reconfigurable Metamaterials. Micromachines\| PubMed ID: 30715059	2018

Gwanho Yoon

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