an-integrated-multimethod-simulation-framework-for-tin-debris-control

An Integrated Multimethod Simulation Framework for Tin Debris Control in Extreme Ultraviolet Lithography

This protocol is a conceptual, integrated modeling framework illustrated with representative results and instructs users on combining the Boltzmann ...

Lanzhou University

The effects of fly ash, sodium carbonate content, foaming temperature and foaming time on foam glass aperture sizes and their distribution were analyzed by the orthogonal experimental design. Results from the steady-state method showed a normal distribution of the number of apertures with change in average aperture, which ranges from 0.1 to 2.0 mm for more than 93% of apertures. For a given porosity, the thermal conductivity decreases with the increase of the aperture size. The apertures in the sample have obvious effects in blocking the heat flow transmission: heat flow is quickly diverted to both sides when encountered with the aperture. When the thickness of the sample is constant, the thermal resistance of the foam glass sample increases with increasing porosity, leading to better thermal insulation. Furthermore, our results suggest that the more evenly distributed and orderly arranged the apertures are in the foam glass material, the larger the thermal resistance of the material and hence, the better the thermal insulation.

Yuwei Ma

Biography

JoVE Journal Publications

Other Publications