Journal
Engineering
Deposition of Bi<sub>2</sub>Te<sub>3</sub> and Sb<sub>2</sub>Te<sub>3</sub> Thin Films on Glass Substrates via RF Sputtering

Deposition of Bi<sub>2</sub>Te<sub>3</sub> and Sb<sub>2</sub>Te<sub>3</sub> Thin Films on Glass Substrates via RF Sputtering

May 17, 2024

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

00:45 min
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Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

03:39 min
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, , , , ,
1Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology,Universiti Sains Islam Malaysia

Summary

English

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The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.

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