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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

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07:55 min

June 18, 2020

DOI:

07:55 min
June 18, 2020

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Summary

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Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves. 

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