2차 이온 질량분석법을 사용한 분리된 불순물의 3D 깊이 프로파일 재구성
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April 29, 2020
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제시된 방법은 2차 이온 질량 분석법과 관련된 측정 아티팩트를 식별 및 해결하고 고체 물질에서 불순물/도펀트의 사실적인 3D 분포를 얻는 방법을 설명합니다.
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Cite this Article
Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).
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