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Atomically Traceable Nanostructure Fabrication
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Atomically Traceable Nanostructure Fabrication

Article DOI: 10.3791/52900-v • 12:35 min • July 17th, 2015
July 17th, 2015 •
1, 2, 3, 4, 5, 1, 1, 1, 4, 5, 1, 3, 3, 4, 5, 1, 1
1Zyvex Labs, 2Department of Physics, University of Texas at Dallas, 3Department of Materials Science and Engineering, University of Texas at Dallas, 4Materials Science and Engineering, University of North Texas, 5National Institute of Standards and Technology

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We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

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Nanostructure Fabrication Atomically Traceable Etched Nanostructures Atomic Scale Understanding Feature Size Feature Density Template Definition Nanostructure Metrology Hydrogen Depassivation Lithography Atomic Layer Deposition Titania Nanoscale Etch Mask Reactive Ion Etching Linewidths Process Integration Fiducial Marks Chemically Reactive Patterned Si(100)-H Surface
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