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Method Article

How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters

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DOI:

10.3791/52816

April 16th, 2015

In This Article

Summary

This movie shows how an atmospheric plasma torch can be ignited by microwaves with no additional igniters and provides a stable and continuous plasma operation suitable for plenty of applications.

Abstract

This movie shows how an atmospheric pressure plasma torch can be ignited by microwave power with no additional igniters. After ignition of the plasma, a stable and continuous operation of the plasma is possible and the plasma torch can be used for many different applications. On one hand, the hot (3,600 K gas temperature) plasma can be used for chemical processes and on the other hand the cold afterglow (temperatures down to almost RT) can be applied for surface processes. For example chemical syntheses are interesting volume processes. Here the microwave plasma torch can be used for the decomposition of waste gases which are harmful and contribute to the global warming but are needed as etching gases in growing industry sectors like the semiconductor branch. Another application is the dissociation of CO2. Surplus electrical energy from renewable energy sources can be used to dissociate CO2 to CO and O2. The CO can be further processed to gaseous or liquid higher hydrocarbons thereby providing chemical storage of the energy, synthetic fuels or platform chemicals for the chemical industry. Applications of the afterglow of the plasma torch are the treatment of surfaces to increase the adhesion of lacquer, glue or paint, and the sterilization or decontamination of different kind of surfaces. The movie will explain how to ignite the plasma solely by microwave power without any additional igniters, e.g., electric sparks. The microwave plasma torch is based on a combination of two resonators — a coaxial one which provides the ignition of the plasma and a cylindrical one which guarantees a continuous and stable operation of the plasma after ignition. The plasma can be operated in a long microwave transparent tube for volume processes or shaped by orifices for surface treatment purposes.

Introduction

Atmospheric pressure microwave plasma torches offer a variety of different applications. On one hand they can be used for chemical volume processes and on the other hand their afterglow plasma can be applied for the treatment of surfaces. As surface treatment processes the treatment to increase the adhesion of glue, paint or lacquer or the decontamination or sterilization of surfaces can be named. The hot and reactive plasma itself can be used for volume processes like the decomposition of waste gases 1–7. These waste gases are harmful, contribute to the global warming and can hardly be degraded conventionally. However, they are needed in growing indu....

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Protocol

1. Measurement of the Magnetron

Note: The schematic of the experimental setup for measuring the magnetron is depicted in Figure 1A.

  1. Connect the magnetron to an insulator consisting of a circulator and a water load with 10 screws.
  2. Connect the insulator to a directional coupler with 10 screws.
  3. Connect the directional coupler to a second water load with 10 screws.
  4. Supply all water loads with water.
  5. Calibrate the spectrum analyzer with its calibration function according to manufacturer’s protocol.
  6. Connect a 20 dB attenuator to the spectrum analyzer by plugging ....

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Results

To provide a plasma ignition without any additional igniters as well as a stable and continuous plasma operation a high quality coaxial resonator with an adjustable resonance frequency was combined with a low quality cylindrical resonator to a microwave plasma torch. The schematic of this plasma torch is presented in Figure 3. The plasma is confined into a microwave-transparent tube, here a quartz tube. This tube can act as a reaction chamber for volume plasma processes or a plasma brush for surface trea.......

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Discussion

The presented movie explains how an ignition of an atmospheric pressure microwave plasma without any additional igniters can be realized, the basic principles of this microwave plasma torch, its adjustment, the ignition process of the plasma and its stable and continuous operation. As described in the introduction, there are already different kinds of microwave plasma torches but none of those provide an ignition of the plasma without any additional igniters as well as stable and continuous plasma operation.

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Disclosures

The authors have nothing to disclose.

Acknowledgements

The authors would like to thank the Arbeitsgemeinschaft industrieller Forschungsvereinigungen „Otto von Guericke“ e.V., AiF (German Federation of Industrial Research Associations) and the Deutsche Forschungsgemeinschaft, DFG (German Research Foundation) for partly funding the presented work under contract number 14248 and STR 662/4-1, respectively.

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Materials

List of materials used in this article
NameCompanyCatalog NumberComments
2 kW magnetronMuegge MH2000S 211BA
2 kW power supplyMuegge ML2000D-111TC
insulator - circulator with water loadMuegge MW1003A-210EC
water loadMuegge MW1002E-260EC
three stub tunerMuegge MW2009A-260ED
orificeshomemade
microwave plasma torchhomemade
spectrum analyzerAgilentE4402B
network analyzerAnritsuMS4662A
calibration kitAnritsumodel 3753
directional couplerhomemade
20 dB attenuatorWeinschee engineering20 dB AA57u8
coaxial to rectangular wave guide transitionMuegge MW5002A-260YD
adaptor 7-16 to N connectorTelegärtner7-16/N Adaptor
coaxial cableRosenberger HochfrequenztechnikLU7_070_800
high speed cameraPhotronfastcam SA5
lensRevueflexmakro revuenon 1:3.5/28mm
local gas ventilationIndustrievertrieb HenningACD220
UV protection glassesuvexHC-F9178265
microwave leakage testerconrad electronicnot available
microwave survey meterHoladay industries inc.81273

References

  1. Hong, Y. C., et al. Microwave plasma torch abatement of NF3 and SF6. Phys. Plasma. 13, 033508(2006).
  2. Kabouzi, Y., et al. Abatement of perfluorinated compounds using microwave plasmas at atmospheric pressure. J. Appl. Phys. 93 (12), 9483....

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Reprints and Permissions

Tags

Atmospheric Pressure PlasmaPlasma IgnitionCoaxial ResonatorCylindrical ResonatorThree Stub TunerMagnetron Frequency DependenceForward Power MaximizationPlasma Stable OperationGas Flow Adjustment