A sampling moiré technique featuring 2-pixel and multi-pixel sampling methods for high-accuracy strain distribution measurements at the micro/nano-scale is presented here.
Method Article
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| Name | Company | Catalog Number | Comments |
|---|---|---|---|
| Automatic Polishing Machine | Marumoto Struers K.K. | LaboPol-30, Labor Force-100 | |
| Carbon Fiber Reinforced Plastic | Mitsubishi Plastics, Inc. | HYEJ16M95DHX1 | |
| Computer | DELL Japan | VOSTRO | Can be replaced with another computer with C++ programming language |
| Image Recording Software | Lasertec Corporation | LMEYE7 | Installed in a laser scanning microscope |
| Ion Coater | Japan Electron Optics Laboratory Ltd. | JEC3000F | |
| Laser Scanning Microscope | Lasertec Corporation | OPTELICS HYBRID | |
| Nanoimprint Device | Japan Laser Corporation | EUN-4200 | Can be replaced with a electron beam lithography device or a focused ion beam milling device |
| Nanoimprint Mold | SCIVAX Corporation | 3.0μm pitch | Customized |
| Nanoimprint Resist | Toyo Gosei Co., Ltd | PAK01 | |
| Polishing Solution | Marumoto Struers K.K. | DP-Spray P 15μm, 1μm, 0.25μm | Use from coarse to fine |
| Pipet | AS ONE Corporation | 10mL | |
| Sand Paper | Marumoto Struers K.K. | SiC Foil #320, #800 | Use from coarse to fine |
| Spin Coater | MIKASA Corporation | MS-A100 |
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