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Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
 

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

Article DOI: 10.3791/52843
May 15th, 2015

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Summary May 15th, 2015

This report describes the use of a custom-built system to perform aerosol deposition of thick films of yttrium iron garnet onto sapphire substrates at RT. The deposited films are characterized using scanning electron microscopy, profilometry, and ferromagnetic resonance to give a representative overview of the capabilities of the technique.

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