Waiting
Login processing...

Trial ends in Request Full Access Tell Your Colleague About Jove
JoVE Journal
Chemistry

A subscription to JoVE is required to view this content.
You will only be able to see the first 2 minutes.

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
 

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

Article DOI: 10.3791/54268
July 26th, 2016

Chapters

Summary July 26th, 2016

This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.

Transcript

Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter