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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
JoVE Journal
Chemistry
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JoVE Journal Chemistry
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

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09:45 min

July 26, 2016

DOI:

09:45 min
July 26, 2016

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Summary

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This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.

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