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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
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JoVE Journal Engineering
Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

DOI:
10.3791/55649-v

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08:01 min

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June 17, 2017

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, , ,
1School of Engineering and Sciences,Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering,University of California, 3BBB Inc

Chapters

  • 00:05Title
  • 01:473D Polymer-based Carbon Structure Fabrication
  • 05:123D Human Hair-derived Carbon Structure Fabrication
  • 06:19Results: Human Hair-derived 3D Carbon Microstructures
  • 07:21Conclusion

Summary

Automatic Translation

Automatic Translation

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

Tags

Keywords: 3D Carbon Microelectromechanical Systems (C-MEMS)Carbon Microelectromechanical SystemsPolymer PrecursorCarbon FabricationCarbon StructuresIsometric ShrinkageCarbon AllotropesGraphiticDiamond-likeGlassy CarbonPolymer Structure FabricationSpin CoatingPhotoresistPhotolithography

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