Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Filters are very popular and widely used in receiver and transmitter sequence in wireless communication. In addition, gas sensors, biosensors and temperature sensors are the most popular application. These high demanding filters should be fabricated in CMOS MEMS process to support both a more reliable fabrication and low noise signal design by eliminating the extra wires between two separate chips.

Here, CMOS stands for complementary metal oxide semiconductor and MEMS stands for microelectromechanical systems and sensors. Moreover, the post process should be designed in a way to avoid stiction during the fabrication process. A well known method to measure the resonance of the MEMS resonators is using network analyzer but it is not as powerful method as laser doppler vibrometer technique due to following reasons.