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A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Article DOI: 10.3791/59026-v • 09:03 min • January 7th, 2019
January 7th, 2019 •
*1, *1, 2, 3, 1,4
1Department of Electrical and Computer Engineering, Michigan State University, 2Naval Research Laboratory, Stennis Space Center, 3Oak Ridge National Laboratory, 4Department of Electrical and Computer Engineering, University of Nebraska-Lincoln
* These authors contributed equally

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Summary
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This work reports an innovative silicon-tipped fiber-optic sensing platform (Si-FOSP) for high-resolution and fast-response measurement of a variety of physical parameters, such as temperature, flow, and radiation. Applications of this Si-FOSP span from oceanographic research, mechanical industry, to fusion energy research.

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Silicon-tipped Fiber-optic Sensing Platform High Resolution Fast Response Underwater Thermometer Turbulence Characterization Ocean Waters Sensitivity Small Size Manufacturability MEMS Fabrication Techniques Temperature-related Measurements Liquid And Gas Flow Measurements High-temperature Plasma Radiation Silicon Pillars Silicon Wafer Spectrometer Photoresist Lead-in Fiber Stripping Plastic Coating Optical Fiber Cleaver UV Curable Glue Glass Slide
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