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Fremstilling af nanohøjdekanaler med Surface Acoustic Wave-aktivering via lithiumniobat til akustisk nanofluidics
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Fremstilling af nanohøjdekanaler med Surface Acoustic Wave-aktivering via lithiumniobat til akustisk nanofluidics

Article DOI: 10.3791/60648-v • 07:23 min • February 5th, 2020
February 5th, 2020 •
1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine, University of California San Diego

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Vi demonstrerer fabrikation af nanohøjdekanaler med integration af akustiske bølgeaktiveringsanordninger på overfladen, når lithiumniobate for akustisk nanofluidics via liftoff fotolitografi, nanodybdereaktiv ionætsning og plasma ved stuetemperatur overfladeaktiveret flerlagsbinding af enkeltkrystallithiumniobat, en proces, der ligeledes er nyttig til limning af lithiumniobat til oxider.

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Engineering acoustofluidics nanofluidics nanofabrikation akustiske overfladebølger stuetemperaturbinding lithiumniobat plasmaaktiveret binding
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