High-precision micro-displacement measurement is significant in the field of aerospace engineering, ultra-precision machining, and micro-assembly. The present protocol describes measuring micro displacements based on the shadow technique.
Method Article
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| Name | Company | Catalog Number | Comments |
|---|---|---|---|
| Aperture diaphragm | Processed by high precision grinding | The diameter of the aperture is 0.7 mm. | |
| Camera | Canon | EOS80D | The pixel size and the resolution of the camera are about 3.72 μm and 4000 × 6000, respectively. |
| HALCON | MVTec Software GmbH | 18.11 | MVTec HALCON is the comprehensive standard software for machine vision with an integrated development environment (HDevelop) that is used worldwide. |
| Motorized linear stage | Zolix | TSA50-C | Resolution 0.625 μm |
| Parallel light source | Oriental Technology (Shanghai) Co, Ltd. | BTPL-50G | The peak wavelength is 523 nm. |
| Polydimethylsiloxane (PDMS) | Dow Corning | Sylgard 184 | PDMS is a transparent silicon-based crosslinked polymer. |
| Vacuum pump | SHANGHAI LICHEN-BX INSTRUMENT TECHONOLOGY CO.,Ltd | 2XZ-6B | The pumping rate is 6 L/s.The ultimate vacuum is ≤1 Pa |
| Vertical precision positioner | PI | P-620.ZCD | The resolution is 0.2 nm in the range of 50 μm. |
| Workbench with three rigid cylindrical legs | Processed by high precision grinding | The diameter of legs is 0.5 mm. The legs are distributed on the trisection points of a circle with a radius of 14 mm |
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