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Journal / Engineering / 향상된 광 불산 패시베이션 : 벌크 실리콘 결함을 검출하기위한 민감한…
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JoVE Journal Engineering
향상된 광 불산 패시베이션
In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography
Journal (Engineering)
In Situ Surface Temperature Measurement in a Conveyor Belt Furnace via Inline Infrared Thermography
Modeling and Experimental Analysis of the Single-Shaft Coaxial Motor-Pump Assembly in Electrohydrostatic Actuators
Journal (Engineering)
Modeling and Experimental Analysis of the Single-Shaft Coaxial Motor-Pump Assembly in Electrohydrostatic Actuators
 
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향상된 광 불산 패시베이션 : 벌크 실리콘 결함을 검출하기위한 민감한 기술

Article DOI: 10.3791/53614-v • 09:15 min • January 4th, 2016
January 4th, 2016 •
1
1Research School of Engineering, Australian National University

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벌크 실리콘 결함 재조합 활성을 조사하기 위해 RT 액면 패시베이션 기술을 설명한다. 1 분 동안 15 % 불화 수소산 및 (iii) 조명 (I)에서 화학 세정 및 실리콘 에칭, 실리콘 (II) 침수 : 기술이 성공하기 위해서는 세 가지 중요한 단계가 필요합니다.

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공학 문제 (107) 벌크 수명 결함 플루오르 화 수소산 조명 보호 photoconductance 재조합.
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