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Fabricage en karakterisering van thicknessmodus Piëzo-elektrische apparaten voor verneveling en acoustofluidics
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Fabricage en karakterisering van thicknessmodus Piëzo-elektrische apparaten voor verneveling en acoustofluidics

Article DOI: 10.3791/61015-v • 10:39 min • August 5th, 2020
August 5th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego, 2Department of Surgery, School of Medicine, University of California San Diego

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Fabricage van piëzo-elektrische dikte modus transducers via gelijkstroom sputteren van plaatelektroden op lithium niobate wordt beschreven. Bovendien wordt een betrouwbare werking bereikt met een transducerhouder en vloeistoftoevoersysteem en wordt karakterisering aangetoond via impedantieanalyse, laserdrolbaarheid, snelle beeldvorming en druppelgrootteverdeling met behulp van laserverstrooiing.

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Engineering acoustofluidics lithium niobate verneveling laser doppler vibrometrie high-speed imaging vernevelaar
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