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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Article DOI: 10.3791/53630-v • 10:28 min • July 5th, 2016
July 5th, 2016 •
1, 1, 1, 2, 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

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Summary
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We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

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Compact Lens-less Digital Holographic Microscope MEMS Inspection MEMS Characterization Optical Full-field Measurements Computational Techniques Experimental Techniques Semiconductor Industry Mechanical Properties Manufacturing Stages Non-contact Real-time High-resolution 3D Map Reflective Object Wafer Inspection Optics Reference Testing Transparent Geometry Micro-optics Inspection Diffractive Optics Inspection Bioimaging Compact Digital Holographic Microscope (CDHM) Silicon Wafer Characterization Gold Electrodes
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