single-digit-nanometer-electron-beam-lithography-with-an-aberration

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

We demonstrate extension of electron-beam lithography using conventional resists and pattern transfer processes to single-digit nanometer dimensions by ...

Brookhaven National Laboratory

Oxygen-deficiency-induced superlattice structures of chromia nanobelts.

A major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based on re-usable silicon membrane hard masks, patterned using standard lithography and mature silicon processing technology. These masks, transferred precisely onto targeted regions, can be in the millimetre scale. They allow for fabrication on a wide range of substrates, including rough, soft, and non-conductive materials, enabling feature linewidths down to 10 nm. Plasma etching, lift-off, and ion implantation are realized without the need for scanning electron/ion beam processing, UV exposure, or wet etching on target substrates.

Nanofabrication on unconventional substrates using transferred hard masks.

Silicon photonics holds great promise for low-cost large-scale photonic integration. In its future development, integration density will play an ever-increasing role in a way similar to that witnessed in integrated circuits. Waveguides are perhaps the most ubiquitous component in silicon photonics. As such, the density of waveguide elements is expected to have a crucial influence on the integration density of a silicon photonic chip. A solution to high-density waveguide integration with minimal impact on other performance metrics such as crosstalk remains a vital issue in many applications. Here, we propose a waveguide superlattice and demonstrate advanced superlattice design concepts such as interlacing-recombination that enable high-density waveguide integration at a half-wavelength pitch with low crosstalk. Such waveguide superlattices can potentially lead to significant reduction in on-chip estate for waveguide elements and salient enhancement of performance for important applications, opening up possibilities for half-wavelength-pitch optical-phased arrays and ultra-dense space-division multiplexing. 

High-density waveguide superlattices with low crosstalk.

Human hair has three main regions, the medulla, the cortex, and the cuticle. An existing model for the cortex suggests that the α-keratin- based intermediate filaments (IFs) align with the hair's axis, but are orientationally disordered in-plane. We found that there is a new region in the cortex near the cuticle's boundary in which the IFs are aligned with the hair's axis, but additionally, they are orientationally ordered in-plane due to the presence of the cuticle/hair boundary. Further into the cortex, the IF arrangement becomes disordered, eventually losing all in-plane orientation. We also find that in the cuticle, a key diffraction feature is absent, indicating the presence of the β-keratin rather than that of the α-keratin phase. This is direct structural evidence that the cuticle contains β-keratin sheets. This work highlights the importance of using a sub-micron x-ray beam to unravel the structures of poorly ordered, multi-phase systems. 

Local structure of human hair spatially resolved by sub-micron X-ray beam.

The electron-doping-induced phase transition of a prototypical perovskite SmNiO3 induces a large and non-volatile optical refractive-index change and has great potential for active-photonic-device applications. Strong optical modulation from the visible to the mid-infrared is demonstrated using thin-film SmNiO3 . Modulation of a narrow band of light is demonstrated using plasmonic metasurfaces integrated with SmNiO3 .

Correlated Perovskites as a New Platform for Super-Broadband-Tunable Photonics.

Next-generation 'smart' nanoparticle systems should be precisely engineered in size, shape and composition to introduce multiple functionalities, unattainable from a single material. Bottom-up chemical methods are prized for the synthesis of crystalline nanoparticles, that is, nanocrystals, with size- and shape-dependent physical properties, but they are less successful in achieving multifunctionality. Top-down lithographic methods can produce multifunctional nanoparticles with precise size and shape control, yet this becomes increasingly difficult at sizes of ∼10 nm. Here, we report the fabrication of multifunctional, smart nanoparticle systems by combining top-down fabrication and bottom-up self-assembly methods. Particularly, we template nanorods from a mixture of superparamagnetic ZnFeO and plasmonic Au nanocrystals. The superparamagnetism of ZnFeO prevents these nanorods from spontaneous magnetic-dipole-induced aggregation, while their magnetic anisotropy makes them responsive to an external field. Ligand exchange drives Au nanocrystal fusion and forms a porous network, imparting the nanorods with high mechanical strength and polarization-dependent infrared surface plasmon resonances. The combined superparamagnetic and plasmonic functions enable switching of the infrared transmission of a hybrid nanorod suspension using an external magnetic field.

High-strength magnetically switchable plasmonic nanorods assembled from a binary nanocrystal mixture.

Research on two-dimensional designer optical structures, or metasurfaces, has mainly focused on controlling the wavefronts of light propagating in free space. Here, we show that gradient metasurface structures consisting of phased arrays of plasmonic or dielectric nanoantennas can be used to control guided waves via strong optical scattering at subwavelength intervals. Based on this design principle, we experimentally demonstrate waveguide mode converters, polarization rotators and waveguide devices supporting asymmetric optical power transmission. We also demonstrate all-dielectric on-chip polarization rotators based on phased arrays of Mie resonators with negligible insertion losses. Our gradient metasurfaces can enable small-footprint, broadband and low-loss photonic integrated devices.

Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces.

Patterning materials efficiently at the smallest length scales is a longstanding challenge in nanotechnology. Electron-beam lithography (EBL) is the primary method for patterning arbitrary features, but EBL has not reliably provided sub-4 nm patterns. The few competing techniques that have achieved this resolution are orders of magnitude slower than EBL. In this work, we employed an aberration-corrected scanning transmission electron microscope for lithography to achieve unprecedented resolution. Here we show aberration-corrected EBL at the one nanometer length scale using poly(methyl methacrylate) (PMMA) and have produced both the smallest isolated feature in any conventional resist (1.7 ± 0.5 nm) and the highest density patterns in PMMA (10.7 nm pitch for negative-tone and 17.5 nm pitch for positive-tone PMMA). We also demonstrate pattern transfer from the resist to semiconductor and metallic materials at the sub-5 nm scale. These results indicate that polymer-based nanofabrication can achieve feature sizes comparable to the Kuhn length of PMMA and ten times smaller than its radius of gyration. Use of aberration-corrected EBL will increase the resolution, speed, and complexity in nanomaterial fabrication.

Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale.

Small-angle X-ray scattering (SAXS) often includes an unwanted background, which increases the required measurement time to resolve the sample structure. This is undesirable in all experiments, and may make measurement of dynamic or radiation-sensitive samples impossible. Here, we demonstrate a new technique, applicable when the scattering signal is background-dominated, which reduces the requisite exposure time. Our method consists of exploiting coherent interference between a sample with a designed strongly scattering 'amplifier'. A modified angular correlation function is used to extract the symmetry of the interference term; that is, the scattering arising from the interference between the amplifier and the sample. This enables reconstruction of the sample's symmetry, despite the sample scattering itself being well below the intensity of background scattering. Thus, coherent amplification is used to generate a strong scattering term (well above background), from which sample scattering is inferred. We validate this method using lithographically defined test samples.

Coherent amplification of X-ray scattering from meso-structures.

Modulus of resilience, the measure of a material's ability to store and release elastic strain energy, is critical for realizing advanced mechanical actuation technologies in micro/nanoelectromechanical systems. In general, engineering the modulus of resilience is difficult because it requires asymmetrically increasing yield strength and Young's modulus against their mutual scaling behavior. This task becomes further challenging if it needs to be carried out at the nanometer scale. Here, we demonstrate organic-inorganic hybrid composite nanopillars with one of the highest modulus of resilience per density by utilizing vapor-phase aluminum oxide infiltration in lithographically patterned negative photoresist SU-8. In situ nanomechanical measurements reveal a metal-like high yield strength (∼500 MPa) with an unusually low, foam-like Young's modulus (∼7 GPa), a unique pairing that yields ultrahigh modulus of resilience, reaching up to ∼24 MJ/m as well as exceptional modulus of resilience per density of ∼13.4 kJ/kg, surpassing those of most engineering materials. The hybrid polymer nanocomposite features lightweight, ultrahigh tunable modulus of resilience and versatile nanoscale lithographic patternability with potential for application as nanomechanical components which require ultrahigh mechanical resilience and strength.

Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites.

Planar nanocrystal/bulk heterostructures are transformed into 3D architectures by taking advantage of the different chemical and mechanical properties of nanocrystal and bulk thin films. Nanocrystal/bulk heterostructures are fabricated via bottom-up assembly and top-down fabrication. The nanocrystals are capped by long ligands introduced in their synthesis, and therefore their surfaces are chemically addressable, and their assemblies are mechanically "soft," in contrast to the bulk films. Chemical modification of the nanocrystal surface, exchanging the long ligands for more compact chemistries, triggers large volume shrinkage of the nanocrystal layer and drives bending of the nanocrystal/bulk heterostructures. Exploiting the differential chemo-mechanical properties of nanocrystal and bulk materials, the scalable fabrication of designed 3D, cell-sized nanocrystal/bulk superstructures is demonstrated, which possess unique functions derived from nanocrystal building blocks.

Article	Year
Oxygen-deficiency-induced superlattice structures of chromia nanobelts. Angewandte Chemie (International ed. in English)\| PubMed ID: 16960913	2006
Nanofabrication on unconventional substrates using transferred hard masks. Scientific reports\| PubMed ID: 25588550	2015
High-density waveguide superlattices with low crosstalk. Nature communications\| PubMed ID: 25960367	2015
Local structure of human hair spatially resolved by sub-micron X-ray beam. Scientific reports\| PubMed ID: 26617337	2015
Correlated Perovskites as a New Platform for Super-Broadband-Tunable Photonics. Advanced materials (Deerfield Beach, Fla.)\| PubMed ID: 27573540	2016
High-strength magnetically switchable plasmonic nanorods assembled from a binary nanocrystal mixture. Nature nanotechnology\| PubMed ID: 27819691	2017
Controlling propagation and coupling of waveguide modes using phase-gradient metasurfaces. Nature nanotechnology\| PubMed ID: 28416817	2017
Aberration-Corrected Electron Beam Lithography at the One Nanometer Length Scale. Nano letters\| PubMed ID: 28418673	2017
Coherent amplification of X-ray scattering from meso-structures. IUCrJ\| PubMed ID: 28989716	2017
Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites. Nano letters\| PubMed ID: 29048904	2017
3D Nanofabrication via Chemo-Mechanical Transformation of Nanocrystal/Bulk Heterostructures. Advanced materials (Deerfield Beach, Fla.)\| PubMed ID: 29658166	2018

Aaron Stein

Biography

JoVE Journal Publications

Other Publications