monolayer-contact-doping-silicon-surfaces-nanowires-using

Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds

Monolayer Contact Doping (MLCD) is a simple method for doping of surfaces and nanostructures1. MLCD results in the formation of highly controlled, ultra ...

The Hebrew University of Jerusalem

Modification of the metal's electronic environment by ligand association and dissociation in metalloenzymes is considered cardinal to their catalytic activity. We have recently presented a novel system that utilizes the bacteriochlorophyll (BChl) macrocycle as a ligand and reporter. This system allows for charge mobilization in the equatorial plane and experimental estimate of changes in the electronic charge density around the metal with no modification of the metal's chemical environment. The unique spectroscopy, electrochemistry and coordination chemistry of [Ni]-bacteriochlorophyll ([Ni]-BChl) enable us to follow directly fine details and steps involved in the function of the metal redox center. This approach is utilized here whereby electro-chemical reduction of [Ni]-BChl to the monoanion [Ni]-BChl(-) results in reversible dissociation of biologically relevant axial ligands. Similar ligand dissociation was previously detected upon photoexcitation of [Ni]-BChl (Musewald, C.; Hartwich, G.; Lossau, H.; Gilch, P.; Pollinger-Dammer, F.; Scheer, H.; Michel-Beyerle, M. E. J. Phys. Chem. B 1999, 103, 7055-7060 and Noy, D.; Yerushalmi, R.; Brumfeld, V.; Ashur, I.; Baldridge, K. K.; Scheer, H.; Scherz, A. J. Am. Chem. Soc. 2000, 122, 3937-3944). The electrochemical measurements and quantum mechanical (QM) calculations performed here for the neutral, singly reduced, monoligated, and singly reduced, monoligated [Ni]-BChl suggest the following: (a) Electroreduction, although resulting in a pi anion [Ni]-BChl(-) radical, causes electron density migration to the [Ni]-BChl core. (b) Reduction of nonligated [Ni]-BChl does not change the macrocycle conformation, whereas axial ligation results in a dramatic expansion of the metal core and a flattening of the highly ruffled macrocycle conformation. (c) In both the monoanion and singly excited [Ni]-BChl ([Ni]-BChl*), the frontier singly occupied molecular orbital (SOMO) has a small but nonnegligible metal character. Finally, (d) computationally, we found that a reduction of [Ni]-BChl*imidazole results in a weaker metal-axial ligand bond. Yet, it remains weakly bound in the gas phase. The experimentally observed ligand dissociation is accounted for computationally when solvation is considered. On the basis of the experimental observations and QM calculations, we propose a mechanism whereby alterations in the equatorial pi system and modulation of sigma bonding between the axial ligands and the metal core are mutually correlated. Such a mechanism highlights the dynamic role of axial ligands in regulating the activity of metal centers such as factor F430 (F430), a nickel-based coenzyme that is essential in methanogenic archea.

Mutual control of axial and equatorial ligands: model studies with [Ni]-bacteriochlorophyll-a.

The prediction and measurement of charge distribution among interacting chemical entities in complex environments is a major challenge for modern chemistry. It encompasses information concerning fundamental quantities such as the electronic chemical potential and hardness of molecular fragments as well as their interactions with the surroundings. Although a wealth of theoretical work has been accumulated from the days of Pauling to the present, a specific molecular model system that allows quantitative and direct measurement of these properties has not yet been reported. Because atomic charges are not quantum mechanical observables, they cannot be derived from first principles, but rather they rely on the availability of high-precision experimental data and the interpretation of related experimental observables. Here, we demonstrate, for the first time, that a fragmental charge flow between a chelated metal center and reversibly bound molecules can be accurately monitored experimentally.

An experimental look into subelectron charge flow.

We demonstrate the design and formation of thin films having divergent physicochemical properties by using two porphyrin building blocks with high chemical and optical resemblance. A predetermined variation in the molecular design is efficiently transferred and enhanced when constituting a two-dimensional film via control of molecular orientation. Variations of the peripheral substituents on the porphyrin ring resulted in control of the molecular orientation at the surface.

Enhancement of molecular properties in thin films by controlled orientation of molecular building blocks.

The remarkable advances accomplished in the past two decades in theoretical and computational capabilities have made the in silico study of complex chemical systems feasible. However, this progress is in strong contrast to the lag in experimental capabilities relating to the measurement of fundamental chemical quantities within convoluted environments such as solvents or protein milieu. As a result, many works rely extensively on predictions provided by ab initio methodologies without having independent experimental support. Such a proliferation of theory and computational approaches without being substantiated by appropriate experimental data is undesirable. The feasibility of using nickel-bacteriochlorophyll as a molecular potentiometer was recently demonstrated for the systematic evaluation of fragmental charge density transfer for metal complexes in solution, thus providing an experimental assay with high accuracy and sensitivity (better than +/-0.005 e(-); Yerushalmi, R.; Baldridge, K. K.; Scherz, A. J. Am. Chem. Soc. 2003, 125, 12706-12707). Here the experimentally determined fragmental charge density transfer values measured by the molecular potentiometer for metal complexes in solvent are used to provide, for the first time, an independent and critical experimental evaluation of theoretical approaches commonly used in determining atomic charges and fragmental charge density transfer among interacting molecular systems. Importantly, these findings indicate that the natural population analysis (NPA) charge analysis is highly robust and well-suited for determining charge transfer processes involving donor-acceptor coordination interactions. The majority of computational charge schemes fail to provide an accurate chemical picture for the whole range of systems considered here. In cases where the role of electronic correlation varies significantly among chemically related structures, as with mono- and biligated complexes, the widely used electrostatic potential fit-based methods for evaluating atomic charges may prove to be problematic for predictive studies. In such cases, alternative methods that do not rely on the net dipole moment or other higher multipoles of the system for determining charges should be employed.

Direct experimental evaluation of charge scheme performance by a molecular charge-meter.

Hydrogen bonds play an important role in an overwhelming variety of fields from biology to surface and supramolecular chemistry. The term "hydrogen bond" refers to a wide range of interactions with various covalent and polar contributions. In particular, hydrogen bonds have an important role in the folding and packing of peptides and nucleic acids. Recent studies also point to the importance of hydrogen bonding in the context of second-shell interactions, in metal binding and selectivity in metalloproteins, and in controlling the dynamics of membrane proteins. In this study, we demonstrate and quantify the modulation of fragmental charge transfer from hydrogen-bonded ligands to a metal center, by employing our recently introduced molecular potentiometer. The molecular details that affect this type of fragmental charge transfer are presented and a path for transferring chemical information is demonstrated. We found that H-bond interactions in the extended positions of axial ligands provide an effective means of modulating the amount of fragmental charge transfer to a metal center, thereby dramatically influencing the electronic properties of the ligand, the binding affinity, and the binding of additional ligands. The magnitude of fragmental charge-transfer modulation induced by a single ligand-solvent H-bond interaction is comparable to those induced by covalent substitution, although H-bond enthalpy is only on the order of several kilojoules per mole. Importantly, we find a significant change in the ligand electronic properties, even for weak C-H...O=C H-bond formation, where the bond enthalpy is substantially lower than for conventional H-bond interactions. The excess fragmental charge transferred to the metal center, deduced from the spectroscopic measurements, correlates well with the computationally determined values. Our findings underscore the importance of second-shell interactions in the active sites of enzymes, beyond the structural and electrostatic importance that is widely recognized today.

Modulation of fragmental charge transfer via hydrogen bonds. Direct measurement of electronic contributions.

A general approach is demonstrated for the formation of monolayers comprised of free-base and metalated Bacteriochlorophyll-based derivatives providing a new vehicle for studying photosynthetic motifs and chromophore thin-film interactions. Accessibility to covalent and self-assembled systems on conducting, semiconducting, and insulating substrates is realized utilizing identical molecular building blocks. The monolayers retain the optical features typical for the new systems in solution. Molecular organization of chromophore interaction motifs can be sequentially designed using preassembled building blocks in solution and expressed in the thin film optical properties. For instance, intramolecular pi-pi stacking is conserved for the dimeric Ni-based chromophores as deduced from the spectroscopic measurements of the monolayers and in solution.

Uniform approach to bacteriochlorophyll-based monolayers on conducting, semiconducting, and insulating substrates.

Potential profiles across molecular layers are constructed by means of noncontact electrically stimulated photoelectron spectroscopy, probing for the first time the molecule-substrate interface potential and resolving local screening effects across inner phenyl groups.

Submolecular potential profiling across organic monolayers.

A generic approach for deploying various types of synthetic nanomaterials, including single-walled carbon nanotubes and nanoparticles, at well-defined locations on substrates is presented. The assembly is achieved through the complementary design of the stationary and carrier phases and utilizes the dewetting process during which polymer-encapsulated nanomaterials are delivered and positioned on predefined locations of substrates. Covalent modification of the nano-objects is not required for the building block positioning, therefore, preserving their intrinsic chemical and physical properties. The potency of this new approach is demonstrated for various synthetic nanomaterials, such as polystyrene, silica, and gold nanoparticles as well as single-walled carbon nanotubes, showing highly specific and direct patterning of cm2 areas using a generic assembly strategy.

Generic nanomaterial positioning by carrier and stationary phase design.

Controlled and uniform assembly of "bottom-up" nanowire (NW) materials with high scalability presents one of the significant bottleneck challenges facing the integration of nanowires for electronic applications. Here, we demonstrate wafer-scale assembly of highly ordered, dense, and regular arrays of NWs with high uniformity and reproducibility through a simple contact printing process. The assembled NW pitch is shown to be readily modulated through the surface chemical treatment of the receiver substrate, with the highest density approaching approximately 8 NW/mum, approximately 95% directional alignment, and wafer-scale uniformity. Such fine control in the assembly is attained by applying a lubricant during the contact printing process which significantly minimizes the NW-NW mechanical interactions, therefore enabling well-controlled transfer of nanowires through surface chemical binding interactions. Furthermore, we demonstrate that our printing approach enables large-scale integration of NW arrays for various device structures on both rigid silicon and flexible plastic substrates, with a controlled semiconductor channel width ranging from a single NW ( approximately 10 nm) up to approximately 250 microm, consisting of a parallel array of over 1250 NWs and delivering over 1 mA of ON current.

Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing.

One of the major challenges towards scaling electronic devices to the nanometre-size regime is attaining controlled doping of semiconductor materials with atomic accuracy, as at such small scales, the various existing technologies suffer from a number of setbacks. Here, we present a novel strategy for controlled, nanoscale doping of semiconductor materials by taking advantage of the crystalline nature of silicon and its rich, self-limiting surface reaction properties. Our method relies on the formation of a highly uniform and covalently bonded monolayer of dopant-containing molecules, which enables deterministic positioning of dopant atoms on the Si surfaces. In a subsequent annealing step, the dopant atoms are diffused into the Si lattice to attain the desired doping profile. We show the versatility of our approach through controlled p- and n-doping of a wide range of semiconductor materials, including ultrathin silicon-on-insulator substrates and nanowires, which are then configured into novel transistor structures.

Controlled nanoscale doping of semiconductors via molecular monolayers.

Phosphine oxide monolayers on SiO2 surfaces.

We report the formation of sub-5 nm ultrashallow junctions in 4 in. Si wafers enabled by the molecular monolayer doping of phosphorus and boron atoms and the use of conventional spike annealing. The junctions are characterized by secondary ion mass spectrometry and noncontact sheet resistance measurements. It is found that the majority ( approximately 70%) of the incorporated dopants are electrically active, therefore enabling a low sheet resistance for a given dopant areal dose. The wafer-scale uniformity is investigated and found to be limited by the temperature homogeneity of the spike anneal tool used in the experiments. Notably, minimal junction leakage currents (<1 microA/cm(2)) are observed that highlights the quality of the junctions formed by this process. The results clearly demonstrate the versatility and potency of the monolayer doping approach for enabling controlled, molecular-scale ultrashallow junction formation without introducing defects in the semiconductor.

Wafer-scale, sub-5 nm junction formation by monolayer doping and conventional spike annealing.

We present the transformation of organic-inorganic hybrid titanicone films formed by TiCl(4) as metal precursor and ethylene glycol (EG) using solvent-free MLD to highly active photocatalytic films. The photocatalytic activities of the films were investigated using hydroxyl-functionalized porphyrin as a spectroscopic marker. TEM imaging and electron diffraction, XPS, UV-vis spectroscopy, and spectroscsopic ellipsometry were employed for structural and composition analyses of the films. The photocatalytic activity of Ti-EG films was investigated for different anneal temperatures and compared to TiO(2) films prepared by ALD using TiCl(4) as metal precursor and H(2)O (TiO(2) films). Overall, our results indicate that the photocatalytic activity of the thermally annealed Ti-EG film is about 5-fold increased compared to that of the TiO(2) film prepared by ALD for optimal process conditions. The combined results indicate that the structural and photocatalytic properties can be assigned to three states: (I) amorphous state, intermediate dye loading, low photocatalytic activity, (II) intermediate film state with both crystalline and amorphous regions, high dye loading, high catalytic activity, and (III) highly crystalline film with low dye loading and low photocatalytic activity. The formation of photocatalytic nanotubes (NTs) is demonstrated using sacrificial Ge nanowires (NWs) scaffolds to yield Ti-EG NT structures with controllable wall thickness structures and enhanced dye loading capacity. Our results demonstrate the feasibility and high potential of MLD to form metal oxides with high photocatalytic activity.

Transformation of organic-inorganic hybrid films obtained by molecular layer deposition to photocatalytic layers with enhanced activity.

Contact doping method for the controlled surface doping of silicon wafers and nanometer scale structures is presented. The method, monolayer contact doping (MLCD), utilizes the formation of a dopant-containing monolayer on a donor substrate that is brought to contact and annealed with the interface or structure intended for doping. A unique feature of the MLCD method is that the monolayer used for doping is formed on a separate substrate (termed donor substrate), which is distinct from the interface intended for doping (termed acceptor substrate). The doping process is controlled by anneal conditions, details of the interface, and molecular precursor used for the formation of the dopant-containing monolayer. The MLCD process does not involve formation and removal of SiO(2) capping layer, allowing utilization of surface chemistry details for tuning and simplifying the doping process. Surface contact doping of intrinsic Si wafers (i-Si) and intrinsic silicon nanowires (i-SiNWs) is demonstrated and characterized. Nanowire devices were formed using the i-SiNW channel and contact doped using the MLCD process, yielding highly doped SiNWs. Kelvin probe force microscopy (KPFM) was used to measure the longitudinal dopant distribution of the SiNWs and demonstrated highly uniform distribution in comparison with in situ doped wires. The MLCD process was studied for i-Si substrates with native oxide and H-terminated surface for three types of phosphorus-containing molecules. Sheet resistance measurements reveal the dependency of the doping process on the details of the surface chemistry used and relation to the different chemical environments of the P═O group. Characterization of the thermal decomposition of several monolayer types formed on SiO(2) nanoparticles (NPs) using TGA and XPS provides insight regarding the role of phosphorus surface chemistry at the SiO(2) interface in the overall MLCD process. The new MLCD process presented here for controlled surface doping provides a simple yet highly versatile means for achieving postgrowth doping of nanometer scale structures and interfaces.

Contact doping of silicon wafers and nanostructures with phosphine oxide monolayers.

More than they appear on the surface: The treatment of SiO2 nanoparticles under mild conditions with two organoboron derivatives led to boron-containing monolayers with different types of surface species (see picture) through the direct formation of Si-O-B bonds. The organoboron-modified SiO2 NPs showed selective reactivity towards diols.

Article	Year
Mutual control of axial and equatorial ligands: model studies with [Ni]-bacteriochlorophyll-a. Journal of the American Chemical Society\| PubMed ID: 12105922	2002
An experimental look into subelectron charge flow. Journal of the American Chemical Society\| PubMed ID: 14558808	2003
Enhancement of molecular properties in thin films by controlled orientation of molecular building blocks. Journal of the American Chemical Society\| PubMed ID: 14995177	2004
Direct experimental evaluation of charge scheme performance by a molecular charge-meter. Journal of the American Chemical Society\| PubMed ID: 15125682	2004
Modulation of fragmental charge transfer via hydrogen bonds. Direct measurement of electronic contributions. The journal of physical chemistry. A\| PubMed ID: 16405312	2006
Uniform approach to bacteriochlorophyll-based monolayers on conducting, semiconducting, and insulating substrates. The journal of physical chemistry. B\| PubMed ID: 16851783	2005
Submolecular potential profiling across organic monolayers. Nano letters\| PubMed ID: 17163717	2006
Generic nanomaterial positioning by carrier and stationary phase design. Nano letters\| PubMed ID: 17661524	2007
Wafer-scale assembly of highly ordered semiconductor nanowire arrays by contact printing. Nano letters\| PubMed ID: 17696563	2008
Controlled nanoscale doping of semiconductors via molecular monolayers. Nature materials\| PubMed ID: 17994026	2008
Phosphine oxide monolayers on SiO2 surfaces. Angewandte Chemie (International ed. in English)\| PubMed ID: 18461577	2008
Wafer-scale, sub-5 nm junction formation by monolayer doping and conventional spike annealing. Nano letters\| PubMed ID: 19161334	2009
Transformation of organic-inorganic hybrid films obtained by molecular layer deposition to photocatalytic layers with enhanced activity. ACS nano\| PubMed ID: 22768917	2012
Contact doping of silicon wafers and nanostructures with phosphine oxide monolayers. ACS nano\| PubMed ID: 23083376	2012
Facile monolayer formation on SiO2 surfaces via organoboron functionalities. Angewandte Chemie (International ed. in English)\| PubMed ID: 23737248	2013

Roie Yerushalmi

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