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浓稠钇铁石榴石薄膜的形成使用气溶胶沉积

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

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工程学

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JoVE 杂志工程学

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

浓稠钇铁石榴石薄膜的形成使用气溶胶沉积

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9,172 Views

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10:52 min

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May 15, 2015

DOI:

10.3791/52843-v

DOI:

10.3791/52843-v

•

10:52 min

May 15, 2015

•

8 Views

Scooter D. Johnson¹, Evan R. Glaser², Fritz J. Kub¹, Charles R. Eddy, Jr.¹

¹Power Electronics Branch,Naval Research Laboratory, ²Physics of Electronic Materials Branch,Naval Research Laboratory

Summary

本报告描述了使用定制系统来在RT执行的钇铁石榴石厚膜的气溶胶沉积在蓝宝石衬底。使用扫描电子显微镜，轮廓，和铁磁谐振得到的技术的功能的代表性概述淀积膜的特征在于。

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