在通过X射线计算机断层扫描（CT）和与扫描电子显微镜相关光学显微镜（LM）的一个组合的LED深度分析（SEM）的

Overview

This article outlines a multimodal micro-characterization workflow for active optical devices, integrating structural and functional investigations. The method is exemplified using a white LED that remains operational during characterization.

Key Study Components

Area of Science

• Micro-characterization
• Optical devices
• Microelectronics

Background

• Importance of linking optical properties to microstructure.
• Applications in failure analysis and reverse engineering.
• Relevance to composite material characterization.
• Potential for preventing device failures.

Purpose of Study

• To provide a comprehensive method for location-dependent data correlation.
• To enhance understanding of microelectronic devices.
• To facilitate the analysis of structural defects.

Methods Used

• X-ray Computed Tomography (CT)
• Light Microscopy (LM)
• Scanning Electron Microscopy (SEM)
• Operational characterization of devices during analysis

Main Results

• Successful integration of multiple imaging techniques.
• Demonstrated correlation between optical and structural properties.
• Insights into device failure mechanisms.
• Applicability to other materials beyond microelectronics.

Conclusions

• The method provides a robust framework for micro-characterization.
• It offers valuable insights into the relationship between structure and function.
• Potential to improve reliability and performance of optical devices.

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