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A Polymer-based Piezoelectric Vibration Energy Harvester with a 3D Meshed-Core Structure

Article DOI: 10.3791/59067-v • 09:51 min • February 20th, 2019
February 20th, 2019 •
1, 1, 1, 1, 1, 1,2
1Gunma University, 2JST PRESTO

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In this study, we fabricated a flexible 3D mesh structure and applied it to the elastic layer of a bimorph cantilever-type vibration energy harvester for the purpose of lowering resonance frequency and increasing output power.

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Polymer-based Piezoelectric Vibration Energy Harvester 3D Meshed-core Structure Fabrication Steps Flexible Mesh Structure Bonding Process Low Frequency Applications Glass Substrates Teflon Jig Cleaning Piranha Solution RF Magnetron Sputtering Machine Chromium Film Spin Coated Chamber Positive Photo Resist Thin Film Spin Coating Baking The Substrate Photo Mask UV Light Exposure TMAH
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