用于高通量低温电子显微镜的可控厚度微图案芯片的制备

2.1K views

07:20 min

April 21st, 2022

10.3791/63739-v

April 21st, 2022

2.1K views

通过应用微机电系统技术制造了新开发的具有氧化石墨烯窗口的微图案芯片,实现了各种生物分子和纳米材料的高效和高通量低温电子显微镜成像。

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Cryogenic Electron Microscopy

Chapters in this video

0:04

Introduction

0:55

Pattern the Photoresist and Silicon Nitride‐Deposited Si Wafer (SixNy)

2:31

Etching the Si and Eliminating the KOH Etching Residues

3:21

Prepare the Micro‐Patterned SixNy and Eliminate the PR

4:25

Transfer Graphene Oxide (GO) by the Drop‐Casting Method

5:30

Results: Analysis of the Micro‐Patterned Chip with GO Windows

6:35

Conclusion

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