用于高通量低温电子显微镜的厚度可控微图案芯片的制备
2.2K 次观看
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07:20 分钟
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2022年4月21日
DOI :10.3791/63739-v
2022年4月21日
•2.2K 次观看
1Department of Biomedical-Chemical Engineering, The Catholic University of Korea, 2Department of Biotechnology, The Catholic University of Korea, 3School of Chemical and Biological Engineering, and Institute of Chemical Processes, Seoul National University, 4Center for Nanoparticle Research, Institute of Basic Science (IBS), 5Institute of Engineering Research, College of Engineering, Seoul National University, 6Advanced Institutes of Convergence Technology, Seoul National University
一种新开发的带有氧化石墨烯窗口的微图案芯片，通过应用微机电系统技术制备而成，可实现对多种生物分子和纳米材料的高效、高通量低温电子显微镜成像。
Chapters in this video
0:04
Introduction
0:55
Pattern the Photoresist and Silicon Nitride‐Deposited Si Wafer (SixNy)
2:31
Etching the Si and Eliminating the KOH Etching Residues
3:21
Prepare the Micro‐Patterned SixNy and Eliminate the PR
4:25
Transfer Graphene Oxide (GO) by the Drop‐Casting Method
5:30
Results: Analysis of the Micro‐Patterned Chip with GO Windows
6:35
Conclusion
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