Ion Milling

Ion milling is a precision material-removal technique that uses energetic ions to shape, polish, or thin solid surfaces, making it valuable in engineering and materials research. In a vacuum, an ion beam, commonly containing argon ions, strikes a target and transfers momentum to surface atoms, ejecting them through sputtering; beam energy, angle, and exposure time control the removal rate and surface profile. The method supports cross-section preparation, thin-film patterning, surface cleaning, and fabrication of micro- and nanoscale devices. Because it can produce controlled features with limited mechanical damage, ion milling complements lithography, microscopy, and semiconductor manufacturing.

Ion Milling - Related Videos

Research

JoVE Journal - Neuroscience
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Focussed Ion Beam Milling and Scanning Electron Microscopy of Brain Tissue

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Cited by 105 •

2011

This protocol describes how resin embedded brain tissue can be prepared and imaged in the three dimensions in the focussed ion beam, scanning electron microscope.

Research

JoVE Journal - Biology
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Workflow Using a Cryogenic Coincident Fluorescence, Electron, and Ion Beam Microscope for Targeted Milling of Cells

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Cited by 2 •

2025

This workflow enables lamella production targeting fluorescently labeled biological structures that are small (<1 μm in axial extent) and rare (1 copy per cell) using a cryogenic tri-coincident imaging platform. This platform integrates fluorescence microscopy, focused ion beam milling, and scanning electron microscopy at a single focal position and enables simultaneous fluorescence microscopy while milling.

Education

JoVE Science Education - Engineering

Focused Ion Beams

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2023

Source: Sina Shahbazmohamadi and Peiman Shahbeigi-Roodposhti-Roodposhti, School of Engineering, University of Connecticut, Storrs, CT As electron microscopes become more complex and widely used in research labs, it becomes more of a necessity to introduce their capabilities. Focused ion beam (FIB) is an instrument that can be employed in order to fabricate, trim, analyze and characterize materials on mico- and nano-scales in a wide variety of fields from nano-electronics to medicine. FIB...

Research

JoVE Journal - Biology
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Sample Preparation by 3D-Correlative Focused Ion Beam Milling for High-Resolution Cryo-Electron Tomography

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Cited by 17 •

2021

Here, we present a pipeline for 3D-correlative focused ion beam milling on guiding the preparation of cellular samples for cryo-electron tomography. The 3D position of fluorescently tagged proteins of interest is first determined by cryo-fluorescence microscopy, and then targeted for milling. The protocol is suitable for mammalian, yeast, and bacterial cells.

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

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2017

Low pressure scanning electron microscopy in a water vapor ambient is used to machine nanoscale to microscale features in carbon nanotube forests.

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