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Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Article DOI: 10.3791/55289-v • 10:29 min • March 23rd, 2017
March 23rd, 2017 •
1, 1, 1, 1
1Department of Electrical and Computer Engineering, University of Minnesota

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A protocol for the design and fabrication of a novel nanopillar-based split ring resonator (SRR) is presented.

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Nanopillar-based Split Ring Resonators Displacement Current Terahertz Metamaterials Gold Electroplating Atomic Layer Deposition Nanoscale Gaps Resonant Frequencies Quality Factor Frequency Shift Transmission Spectra High Sensitive Sensors Frequency-agile Terahertz Devices
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