In its most basic form, an FPE consists of two plane-parallel partially reflecting mirror surfaces1. In the following explanations, when referring to mirrors, the optical substrate and the reflective coating are addressed as one. In most applications, the mirrors used feature one wedged surface2 to prevent unwanted etalon effects. Figure 1 illustrates the formation of the interference pattern of an air-spaced etalon (Figure 1A), as well as the reflectance function for different mirror reflectivities (Figure 1B).
The light enters the cavity through one mirror, undergoes multiple reflections, and leaves the cavity by reflection as well as transmission. As this article focuses on the fabrication of an FPE operated in reflectance, the further explanations refer to reflection specifically. The waves leaving the cavity interfere, depending on the phase difference, q = 4πnd/λ. Here, n is the refractive index inside the cavity, d is the mirror spacing, and λ is the wavelength of the interferometer's light source, here called the probe laser. A minimum reflectance occurs when the optical path difference matches the integer multiple of the wavelength,
. The finesse of an ideal plane-parallel etalon is determined by the mirror reflectivities R1 and R2 only3:

However, a real etalon is subject to many losses, which degrade the theoretically achievable finesse4,5,6. Deviation of the mirror parallelism7, non-normal incidence of the laser beam, beam shape8, mirror surface impurities, and scattering, among others, lead to a reduction in the finesse. The characteristic interference pattern can be described by the Airy function1:

The full width at half maximum (FWHM), as well as the free spectral range (FSR) of the reflectance function, can be calculated as follows:



Figure 1: Fabry-Pérot interferometer theory. (A) A schematic depiction of the multi-beam interference for an air-spaced etalon with wedged windows. A plane wave, E0, enters the cavity under a certain angle, φ, through an anti-reflection (AR)-coated surface and subsequently undergoes multiple reflections between the highly reflecting (high R) surfaces spaced at a distance, d. With each reflection, part of the light is out-coupled of the etalon either in transmission or reflection, where it interferes with the other waves. (B) The reflectance function of an ideal Fabry-Pérot etalon for different mirror reflectivities (y-axis). Please click here to view a larger version of this figure.
FPEs can be found in a wide range of applications9,10,11. In the case presented here, the FPE is used in a photothermal interferometry (PTI) setup. In PTI, small density and, hence, refractive index changes, induced by the periodic excitation followed by the fast thermalization of a target gas via a second laser, are measured interferometrically12. The amount of heat and, thus, the magnitude of the refractive index change are proportional to the gas concentration. When measuring the intensity of the reflectance function of the FPE at its steepest point (operation point), these refractive index changes shift the reflectance function, thereby altering the measured intensity. As the reflectance function can be assumed to be linear in the region around the operation point, the measured signal is then proportional to the gas concentration. The sensor's sensitivity is determined by the slope of the reflectance function and is, therefore, proportional to the finesse. PTI, in combination with FPEs, has proven to be a sensitive and selective method to detect trace amounts of gases and aerosols13,14,15,16,17,18. In the past, many sensors for pressure and acoustic measurements relied on the use of moveable parts, like membranes, substituting the second mirror of the FPE19. Deflections of the membrane lead to a change in the mirror distance and, thus, the optical path length. These instruments have the disadvantage of being prone to mechanical vibrations. In recent years, the development of optical microphones using solid FPEs has reached a commercial level20. By abstaining from the use of moveable parts, the measurand changed from distance to the refractive index inside the Fabry-Pérot cavity, thus increasing the ruggedness of the sensors significantly.
Commercially available air-spaced FPEs cost beyond what is acceptable for prototyping and testing, as well as high-volume production instrument integration. Most scientific publications constructing and using such FPEs discuss the topic of fabrication only minimally21,22. In most cases, specific equipment and machines (e.g., clean rooms, coating facilities, etc.) are necessary; for example, for fully-fiber-integrated FPEs, special micromachining equipment is necessary. To reduce the manufacturing costs and enable the testing of multiple different FPE configurations to enhance their suitability for PTI setups, a new fabrication method was developed, which is described in detail in the following protocol. By using only commercially available, standard bulk-optic and telecom fiber-optic components, the manufacturing costs could be reduced to less than €400 euros. Every facility working with standard photonic equipment should be able to reproduce our fabrication scheme and adapt it to their applications.