Atomik Katman Biriktirme aracılığıyla Germanyum üzerinde Perovskit Stronsiyum Titanate Epitaksiyel Büyüme
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July 26, 2016
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Bu çalışma atomik tabaka birikimi ile germanyum yüzeylerde doğrudan kristal SrTiO 3 büyümesi ve karakterizasyonu için prosedürler ayrıntıları. Prosedür metal oksit yarı iletken cihazlar için yarı iletkenler üzerine monolitik oksitler entegre bir all-kimyasal büyüme yönteminin yeteneğini gösterir.
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Lin, E. L., Edmondson, B. I., Hu, S., Ekerdt, J. G. Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition. J. Vis. Exp. (113), e54268, doi:10.3791/54268 (2016).
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