Silikon Üzerine Epitaxial Nanoyapılı α-Kuvars Filmler: Malzemeden Yeni Cihazlara
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October 06, 2020
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Bu çalışma, difleme kaplama yöntemi ile kuvars filminin epitaksiyel büyümesinden başlayarak silikon-on-insulatör (SOI) teknolojisi alt tabaka üzerinde nanoyapılı α-kuvars kantileatörün mikrofabrikasyonu ve daha sonra nanoimprint litografi ile ince filmin nanoyapılanması için ayrıntılı bir protokol sunun.
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Cite this Article
Jolly, C., Sanchez-Fuentes, D., Garcia-Bermejo, R., Cakiroglu, D., Carretero-Genevrier, A. Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices. J. Vis. Exp. (164), e61766, doi:10.3791/61766 (2020).
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