Engineering
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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Chapters
Summary February 27th, 2013
We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.
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