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Journal / Engineering / 공간적으로 밀폐 복합 산화물의 제조
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Engineering

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JoVE Journal Engineering
공간적으로 밀폐 복합 산화물의 제조
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공간적으로 밀폐 복합 산화물의 제조

Article DOI: 10.3791/50573 • 08:45 min
July 1st, 2013 •
1,2, 1
1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

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July 1st, 2013

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우리는 펄스 레이저 증착법 (PLD), 포토 리소그래피와 마이크로 미터 규모의 복합 산화물 장치를 생성하는 와이어 본딩 기술의 사용을 설명합니다. PLD는 에피 택셜 박막을 성장하기 위하여 이용된다. 포토 리소그래피 및 와이어 본딩 기술은 측정을 위해 실제 디바이스를 생성하기 위해 도입된다.

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