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Journal / Engineering / 合成和高c轴ZnO薄膜等离子体的特性增强化学气相沉积系统及其紫外探测器的应用…
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合成和高c轴ZnO薄膜等离子体的特性增强化学气相沉积系统及其紫外探测器的应用

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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工程，第104，氧化锌薄膜，
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