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Herstellung von makroporösenEpitaxial-Quarz-Films auf Silizium durch Chemical Solution Deposition…
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Chemistry
Chemistry
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Herstellung von makroporösen Epitaxial-Quarz-Films auf Silizium durch Chemical Solution Deposition
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Article
DOI:
10.3791/53543-v
•
07:37 min
•
December 21st, 2015
Herstellung von makroporösen Epitaxial-Quarz-Films auf Silizium durch Chemical Solution Deposition
December 21st, 2015
•