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Herstellung von makroporösen Epitaxial-Quarz-Films auf Silizium durch Chemical Solution Deposition
JoVE Journal
Chemistry
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JoVE Journal Chemistry
Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition

Herstellung von makroporösen Epitaxial-Quarz-Films auf Silizium durch Chemical Solution Deposition

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07:37 min

December 21, 2015

DOI:

07:37 min
December 21, 2015

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Summary

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A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

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