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JoVE Journal Engineering
Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Article DOI: 10.3791/57817-v • 06:27 min • July 2nd, 2018
July 2nd, 2018 •
1, 1, 1
1CEITEC BUT, Brno University of Technology

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A protocol for the fabrication of magnetic micro- and nanostructures with spin configurations forming magnetic vortices suitable for transmission electron microscopy (TEM) and magnetic transmission x-ray microscopy (MTXM) studies is presented.

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Fabrication Magnetic Nanostructures Silicon Nitride Membranes Magnetic Vortex Studies Transmission Microscopy Techniques Micro And Nano Structures Observation Transmission Electron Microscopy X-ray Microscopy Advantage Sample Fabrication Nanometer Thin Meena Dhankhar Marek Vanatka Grad Students Hot Plate Bake Moisture Removal Spin Coater PMMA Resist Film Thickness Post-bake Harden Electron Beam Lithography Graphic Database System (GDS) Upload E-beam Writer System Stage And Beam Setup Electron Dose Methyl Isobutyl Ketone
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