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Journal / Engineering / 实时直流偏置的动态法切换时间改善严重欠阻尼边缘化场静电MEMS致动器…
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实时直流偏置的动态法切换时间改善严重欠阻尼边缘化场静电MEMS致动器
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实时直流偏置的动态法切换时间改善严重欠阻尼边缘化场静电MEMS致动器

Article DOI: 10.3791/51251-v • 11:44 min • August 15th, 2014
August 15th, 2014 •
1, 2, 3, 1, 3
1Department of Electrical and Computer Engineering, University of California, Davis, 2Digital Light Projection (DLP) Technology Development, Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University

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Summary
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当执行使用传统的一步偏置开关操作的边缘电场静电MEMS驱动器会导致固有的低挤压膜阻尼条件和长期稳定时间坚固的设备设计。实时的切换时间的改善，提供直流动态波形降低了边缘场的建立时间之间的转换时，MEMS致动器向上到向下和向下到向上的状态。

Tags

物理学，第90，微机电系统，致动器，开关时间，稳定时间，静电的设备，微加工，薄膜器件
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