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Journal / Engineering / Mg3n2 ve Zn3n2 Ince filmlerin plazma destekli…
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Mg3n2 ve Zn3n2 Ince filmlerin plazma destekli moleküler ışın epitaxy büyümesi

Article DOI: 10.3791/59415-v • 13:05 min • May 11th, 2019
May 11th, 2019 •
1, 1
1Department of Electrical and Computer Engineering, University of Victoria

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Bu makalede, mg3n2 ve Zn3n2 ' nin Epitaksiyel filmlerinin, azot kaynağı ve optik büyüme izleme olarak N2 gaz Ile plazma destekli moleküler kiriş epitaxy tarafından MgO substratlar üzerinde büyümesi anlatılmaktadır.

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Mühendislik sayı 147 plazma destekli moleküler ışın epitaxy II3-V2 Yarıiletken Zn3n2 mg3n2 optik büyüme izleme metal effüzyon hücreleri
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