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Synthese en karakterisering van High c-as ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System en de UV Fotodetector Application

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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Engineering ZnO dunne film, plasma versterkte chemische damp depositie diethylzink (DEZn) sensor Pt interdigitated elektrode ohmse contact UV fotodetector
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