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Journal / Chemistry / 薄膜トランジスタの酸化アルミニウム誘電体層に及ぼす陽極化パラメータの効果…
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薄膜トランジスタの酸化アルミニウム誘電体層に及ぼす陽極化パラメータの効果
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薄膜トランジスタの酸化アルミニウム誘電体層に及ぼす陽極化パラメータの効果

Article DOI: 10.3791/60798-v • 12:32 min • May 24th, 2020
May 24th, 2020 •
*1, *2, *1, *2, *3
1School of Technology and Sciences, São Paulo State University - UNESP, 2Scholl of Electronic Engineering, Bangor University, 3Institute of Geosciences and Exact Sciences, São Paulo State University - UNESP
* These authors contributed equally

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酸化亜鉛薄膜トランジスタ(TfT)の酸化アルミニウム誘電体層の成長のための陽極酸化パラメータは、電気的パラメータ応答に及ぼす影響を決定するために変化する。分散分析(ANOVA)は、実験のプラケット・バーマン計画(DOE)に適用され、デバイス性能の最適化をもたらす製造条件を決定します。

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化学,問題 159 陽極酸化,酸化アルミニウム,誘電層,薄膜トランジスタ,酸化亜鉛,ANOVA
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