Photolithographic Reflow
Photolithographic Reflow - Related Videos
07:19
Cell Patterning on Photolithographically Defined Parylene-C: SiO2 Substrates
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Cited by 9 •
2014
This protocol describes a microfabrication-compatible method for cell patterning on SiO2. A predefined parylene-C design is photolithographically printed on SiO2 wafers. Following incubation with serum (or other activation solution) cells adhere specifically to (and grow according to the conformity of) underlying parylene-C, whilst being repulsed by SiO2 regions.
11:22
High-Density DNA and RNA microarrays - Photolithographic Synthesis, Hybridization and Preparation of Large Nucleic Acid Libraries
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Cited by 9 •
2019
In this article, we present and discuss new developments in the synthesis and applications of nucleic acid microarrays fabricated in situ. Specifically, we show how the protocols for DNA synthesis can be extended to RNA and how microarrays can be used to create retrievable nucleic acid libraries.
07:51
Fabrication of Silica Ultra High Quality Factor Microresonators
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Cited by 22 •
2012
We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.
10:55
Procedure for the Development of Multi-depth Circular Cross-sectional Endothelialized Microchannels-on-a-chip
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Cited by 5 •
2013
A microchannels-on-a-chip platform was developed by the combination of photolithographic reflowable photoresist technique, soft lithography, and microfluidics. The endothelialized microchannels platform mimics the three-dimensional (3D) geometry of in vivo microvessels, runs under controlled continuous perfusion flow, allows for high-quality and real-time imaging and can be applied for microvascular research.
10:18
Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
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Cited by 26 •
2017
Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.
FAQs
The glass-transition temperature marks the condition at which the photoresist softens enough to reshape. Heating above this point allows surface tension to reduce the feature’s surface energy and promote a smoother geometry. If the thermal condition does not produce adequate softening, the patterned form changes less effectively; controlled cooling then preserves the resulting curved structure.
Feature curvature depends on the initial pattern dimensions, the properties of the photoresist, and the applied thermal conditions. These variables determine how readily the material softens and how far surface tension reshapes it. Adjusting them allows researchers to tune the geometry rather than treating reflow as a fixed transformation with one universal outcome.
Photolithography first establishes the location and basic shape of planar photoresist features, whereas reflow modifies those features into rounded or smoothly curved forms. This combination preserves lithographic patterning while adding three-dimensional geometry. The distinction matters when a bioengineering design requires curvature, such as a microlens, rounded channel, or mold for a biological structure.
The workflow begins by using photolithography to define the photoresist pattern. The patterned material is then heated under controlled conditions until it softens and surface tension drives reshaping toward a lower-energy geometry. Finally, cooling stabilizes the reflowed form. The sequence links pattern definition, thermal transformation, and shape preservation in one fabrication process.
Photolithographic Reflow can produce microlenses, rounded microchannels, and three-dimensional molds. These structures support bioengineering platforms for cell culture, tissue engineering, microfluidics, and optical biosensors. The ability to generate curved rather than strictly planar features expands the geometries available for organizing cells, guiding fluids, or shaping optical interfaces.
Reflowed geometries are useful when a device or scaffold must reproduce biologically relevant curvature or provide a three-dimensional architecture. In microfluidics, rounded channels can serve as patterned fluidic features; in cell culture and tissue engineering, molds can help establish designed forms; and in optical biosensors, microlenses can provide curved optical structures.