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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Article DOI: 10.3791/61015-v • 10:39 min • August 5th, 2020
August 5th, 2020 •
1, 1, 1
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego, 2Department of Surgery, School of Medicine, University of California San Diego

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Fabrication of piezoelectric thickness mode transducers via direct current sputtering of plate electrodes on lithium niobate is described. Additionally, reliable operation is achieved with a transducer holder and fluid supply system and characterization is demonstrated via impedance analysis, laser doppler vibrometry, high-speed imaging, and droplet size distribution using laser scattering.

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Fabrication Characterization Thickness Mode Piezoelectric Devices Atomization Acoustofluidics Resonance Frequency Vibrational Mode Vibration Amplitude Transducers Atomizers Independent Variables Experiments Respiratory Diseases Pneumonia Treatment Capillary Waves Droplet Surface Continuous Atomization Power Input Wick Position Wick Orientation Behavior Changes Transducer Holder Soldering Surface Mount Spring Contacts Printed Circuit Boards Spikes
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