Photolithography for Silicon Wafer Patterning

Photolithography is a common microfabrication method used to pattern a silicon wafer. It uses light to transfer a design onto the wafer surface. This process helps form the basis for many BioMEM devices.

The page also shows how photolithography is carried out in a cleanroom. Cleanroom steps are i...

The increased need for portable devices with extremely small sample volumes, has driven the miniaturization of devices called BioMEMs. BioMEMs?are produced via microfabrication. A process of fabricating microscale structures using semiconductor technology. A microfabrication technique called photolithography, is often used to pattern complex pat...