Photolithography for Microfluidic Device Making

Photolithography and soft lithography are used to make BioMEM devices such as microfluidic channels. A microscale pattern is copied by curing an elastomeric polymer over a 3D structure. The result is a polymer piece that can serve as part of a biological device.

These polymer structures are then ...

Soft lithography is a set of rapid, simple, and inexpensive fabrication processes that have been successfully used to pattern the complex channels of microfluidic systems. In the electronics industry, lithography refers to the process of microfabrication using light and light-sensitive polymers to pattern parts of a thin film or the bulk of a su...