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Herstellung von transparenten leitenden Oxide durch Pulsed Laser Deposition Nano-engineered
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Herstellung von transparenten leitenden Oxide durch Pulsed Laser Deposition Nano-engineered

Article DOI: 10.3791/50297-v • 10:27 min • February 27th, 2013
February 27th, 2013 •
1, 1, 1,2, 1,2, 1
1Department of Energy and NEMAS - Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, 2Center for Nano Science and Technology, Instituto Italiano di Tecnologia

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Wir beschreiben die experimentelle Methode nanostrukturierte Oxid Dünnschichten durch Nanosekunde Pulsed Laser Deposition (PLD) abzuscheiden in Gegenwart von einem Hintergrund Gas. Mit dieser Methode Al-dotiertem ZnO (AZO) Filmen, von kompakt bis hierarchisch nano-Baum Wälder strukturiert werden können hinterlegt.

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Materials Science Ausgabe 72 Physik Nanotechnologie Nanotechnik Oxide dünne Filme Dünnschicht-Theorie Abscheidung und Wachstum Pulsed Laser Deposition (PLD) Transparente leitfähige Oxide (TCO) hierarchisch organisierten Nanostrukturierte Oxide Al dotierten ZnO (AZO) Folien erhöhte Lichtstreuvermögen Gasen Abscheiden nanoporus Nanopartikel Van der Pauw Rasterelektronenmikroskopie SEM
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