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Journal / Engineering / 空间密闭的复合氧化物制备
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JoVE Journal Engineering
空间密闭的复合氧化物制备
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空间密闭的复合氧化物制备

Article DOI: 10.3791/50573 • 08:45 min
July 1st, 2013 •
1,2, 1
1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

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July 1st, 2013

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我们描述了使用脉冲激光沉积（PLD），光刻法和引线接合技术来创建微米尺度的复合氧化物的设备。利用PLD生长外延薄膜。光刻和引线键合技术被引入到创建实用的设备测量目的。

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