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Fabrication d'oxydes complexes spatialement confinés

Article DOI: 10.3791/50573 • 08:45 min
July 1st, 2013 •
1,2, 1
1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

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July 1st, 2013

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Nous décrivons l'utilisation de dépôt laser pulsé (PLD), techniques de photolithographie et de fil-liaison pour créer une échelle micrométrique dispositifs d'oxydes complexes. Le PLD est utilisée pour faire pousser des couches minces épitaxiales. techniques de photolithographie et wire-bonding sont introduits pour créer des dispositifs pratiques à des fins de mesure.

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