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JoVE Journal Engineering
Scalable Quantum Integrated Circuits on Superconducting Two-Dimensional Electron Gas Platform
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Scalable Quantum Integrated Circuits on Superconducting Two-Dimensional Electron Gas Platform

Article DOI: 10.3791/57818-v • 05:39 min • August 2nd, 2019
August 2nd, 2019 •
1,2, 2, 2, 2, 2, 3, 4, 2,5, 2, 1, 1,2, 2
1Centre for Advanced Photonics and Electronics, Engineering Department, University of Cambridge, 2Department of Physics, Cavendish Laboratory, University of Cambridge, 3Department of Electronic and Electrical Engineering, University College London, 4Department of Materials Science and Metallurgy, University of Cambridge, 5Department of Electronic and Electrical Engineering, University of Sheffield

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Quantum integrated circuits (QICs) consisting of array of planar and ballistic Josephson junctions (JJs) based on In0.75Ga0.25As two-dimensional electron gas (2DEG) is demonstrated. Two different methods for fabrication of the two-dimensional (2D) JJs and QICs are discussed followed by the demonstration of quantum transport measurements in sub-Kelvin temperatures.

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Scalable Quantum Integrated Circuits Superconducting Two-Dimensional Electron Gas Platform Quantum Transport Hybrid Superconductor-semiconductor Josephson Junctions Two-dimensional Material Platform Proximity-induced Superconductivity Indium Gallium Arsenide JJ's And QIC Device Layout Indium Gallium Arsenide Wafer Acetone Isopropyl Alcohol Nitrogen Gas Photoresist Hot Plate Photomask Mask Aligner UV Light Exposure MF-319 Developer Mesa Layout QIC Layout Etching Process Water Solution Sulfuric Acid Hydrogen Peroxide Deionized Water Rinse DEKTAK Surface Profiler
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