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DOI: 10.3791/57885-v
This article introduces a standard and reliable fabrication procedure for developing low dimensional nanoelectronics. The method addresses key challenges in 2D material device fabrication, particularly in locating material samples accurately.
The article aims to introduce a standard and reliable fabrication procedure for the development of future low dimensional nanoelectronics.
This method can help answer key questions in the field of 2D material device fabrication, related to techniques to precisely locate 2D material samples in the preparation for later fabrication steps. The main advantage of this technique is that this is tailored to the development of small-scale devices, for which finding the location of materials is more challenging. Demonstrating the procedure will be Po-Chun Chen and Kristan, research assistants and graduate students from my laboratory.
The fabrication process requires two prepared substrates. The first is back-gated silicon dioxide on silicon with titanium and gold metal pad arrays. The second substrate is sapphire with a deposited layer of molybdenum disulfide.
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